Question about physics module in low energy em

Hi, everyone

I am trying to do the simulations about the depth distribution of the implanted Nitrogen targets. The beam is 14N with 100 keV and the target is Ta with 1 mm. As sugguested, I used the EMZ EM Opt4 physics moudle. But the result of the stop position of 14N in Ta target seems incorrect. Looks like

The unit is nm.


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