Simulation of displacement events due to low energy e- beam

Hi everyone!

I am looking to simulate the interaction of a material (diamond) with a relatively low-energy e- beam (200 keV). I am particularly interested in obtaining the distribution of target atom displacement events (vacancy production) as a function of depth in the material. Practically, this limits the useful range of interactions to about 200 → 140 keV or so, based on the mean displacement energy of atoms in diamond. I don’t need to track secondary ions since their kinetic energy is very unlikely to be high enough to cause subsequent damage.

I would be very grateful for any advice on which physics list / processes I might look at to simulate this behaviour please? I had been hoping to use the extensions in the microelectronics lists, but unfortunately there all elastic collisions are modelled simply as a trajectory change, rather than elastic energy transfer to the target.

Thank you for your help!

Hi, I suppose you would like to calculate the displacement damage? maybe you can look at Test 58. I found these slides online.
probably they are helpful for your case.

Dear guatelli,

Thank you for your reply. Unfortunately, this example and associated NIEL code doesn’t seem to have been updated since v10.4 - I assume that the patches provided won’t translate directly to v11+ without modification, which is beyond the scope of this work. The current physics manual still refers to test58 but I can’t see any relevant copy.

Additionally, TestEm1 seems to contain a NIEL calculation but as far as I can tell it will only compute NIEL for ions, rather than electrons.

Thanks again for the help