Hi everyone!
I am looking to simulate the interaction of a material (diamond) with a relatively low-energy e- beam (200 keV). I am particularly interested in obtaining the distribution of target atom displacement events (vacancy production) as a function of depth in the material. Practically, this limits the useful range of interactions to about 200 → 140 keV or so, based on the mean displacement energy of atoms in diamond. I don’t need to track secondary ions since their kinetic energy is very unlikely to be high enough to cause subsequent damage.
I would be very grateful for any advice on which physics list / processes I might look at to simulate this behaviour please? I had been hoping to use the extensions in the microelectronics lists, but unfortunately there all elastic collisions are modelled simply as a trajectory change, rather than elastic energy transfer to the target.
Thank you for your help!